Fluid Control Device

ABSTRACT

A fluid control device 1 includes an information processing module 5 provided in the device, a valve body 11 having a flow path, an actuator body 12 fixed to the valve body 11, a hollow casing 13 that is fixed to the actuator body 12 and has a side surface on which a through hole 133d is formed, a piston 126 that is provided in the actuator body 12 and in which a driving pressure introduction path 126b that communicates with a driving pressure introduction chamber S2 is formed, and an introduction pipe 21 through which driving pressure is introduced, the introduction pipe having one end inserted to the driving pressure introduction path 126b and another end leading to an outside through the through hole 133d of the casing 13.

TECHNICAL FIELD

The present invention relates to a fluid control device thataccommodates therein a sensor and an information processing module thatexecutes processing based on data obtained by the sensor.

BACKGROUND ART

Conventionally, film forming processing, for forming a thin film on asurface of a semiconductor wafer, has been required to achieve a finerthin film. In this context, recently, a film forming method, known asAtomic Layer Deposition (ALD), capable of forming a thin film with athickness at an atomic level or a molecular level has been employed.

Meanwhile, due to such an attempt to achieve finer thin films, fluidcontrol devices have been required to perform opening/closing operationsmore frequently than ever. The resultant load may lead to a higher riskof fluid leakage and the like. Thus, there has been an increasing demandfor technology enabling the fluid leakage of the fluid control device tobe easily detected.

Furthermore, a fluid control device and an information collection methodhave been demanded that not only enable the leakage to be detectedeasily, but also are capable of collecting various types ofenvironmental factor information (such as a frequency of use,temperature, humidity, and vibration of the fluid control device thatare not considered conventionally) having impact on abnormalities of thefluid control device, such as the leakage, analyzing correlation betweenthe information and an abnormality, and utilizing a result of theanalysis for estimation of an occurrence of the abnormality.

In a semiconductor manufacturing process, it is important that theleakage can be remotely detected, because highly-reactive andextremely-toxic gas is used in the process.

For implementation of the ALD, a piping connection distance between thefluid control device and a process chamber is important. Specifically,it is important for the fluid control device to be further downsized andarranged very close to a process chamber, so that the process can becontrolled at an even high speed.

In this context, Patent Document 1 proposes a seal portion damagedetection mechanism including: a hole formed on an outer surface of acontroller for controlling the flow rate of a fluid; and a leakdetection member attached to the hole. The hole communicates with a gapinside the controller. The leak detection member comprises a cylindricalbody attached to the hole and a movable member provided in thecylindrical body. The movable member is movable to the outside of thecylindrical body due to pressure of a leaked fluid filling the gap inthe controller.

Further, Patent Document 2 proposes a controller with a seal portiondamage detection mechanism including a hole formed on an outer surfaceof the controller for controlling the flow rate of a fluid and a leakdetection member attached to the hole. The hole communicates with a gapin the controller, and the leak detection member reacts to the presenceof a certain fluid.

Furthermore, Patent Document 3 proposes a leak detection device thatdetects fluid leakage including: a sensor holding body; an ultrasonicsensor that is held by the sensor holding body to face a leak portprovided to a leakage detection target member so that a sealed portionin the leakage detection target member communicates with the outside; anultrasonic path provided between a sensor surface of the ultrasonicsensor and the leak port; and a processing circuit that processesultrasonic waves obtained by the ultrasonic sensor.

CITATION LIST Patent Literature

Patent Literature 1: JP 04-093736 A

Patent Literature 2: JP 05-126669 A

Patent Literature 3: JP 2014-21029 A

SUMMARY OF INVENTION Technical Problem

Any of the devices described in Patent Documents 1, 2, and 3 isimplemented with the mechanism for detecting abnormality attached to theouter side of the fluid control device. In a fluid control apparatus inwhich a plurality of fluid control devices are integrated, the fluidcontrol devices are densely arranged to achieve a compact configuration,and thus it is not preferable to provide a member or the like fordetecting abnormality on the outer side of the fluid control device.

In addition, when wiring connecting the members for detecting anabnormality of the fluid control device to each other is exposed to theoutside, the twisting or short circuiting of the wiring may occur. Thismay lead to a failure in the fluid control device itself.

The movable member required to accurately operate is incorporated in thefluid control device. Thus, when a member for detecting abnormality ofthe fluid control device and the like are incorporated, such member hasto be prevented from interfering with the operation of the movablemember. In addition, to incorporate the member for detecting abnormalityof the fluid control device and the like, the fluid control device needsto have a large size. Such a resultant large size of the fluid controlapparatus is not preferable.

Furthermore, even when a structure in which the member for detectingabnormality in the fluid control device and the like are incorporated isemployed, an abnormality detection result is preferably checkable easilyfrom the outside of the fluid control device.

Furthermore, in any of the above-mentioned devices, sensor data changesonly after the occurrence of abnormality, and thus the failure of theabnormality cannot be predicted.

In view of this, one object of the present invention is to provide afluid control device that can have a small size, while incorporating amember for detecting abnormality of the fluid control device. Anotherobject of the present invention is to enable a result of determining anabnormality of the fluid control device to be easily checkable from theoutside.

Solution to Problem

In order to achieve the above object(s), a fluid control deviceaccording to the present invention includes an information processingmodule provided in the device, a valve body having a flow path, anactuator body fixed to the valve body, a hollow casing that is fixed tothe actuator body and has a side surface on which a through hole isformed, a piston that is provided in the actuator body and in which adriving pressure introduction path that communicates with a drivingpressure introduction chamber is formed, and an introduction pipethrough which driving pressure is introduced, the introduction pipehaving one end inserted to the driving pressure introduction path andanother end leading to an outside through the through hole of thecasing.

An information display panel through hole to which an informationdisplay panel is fit may be formed on an upper surface of the casing,the information display panel being connected to the informationprocessing module.

The fluid control device may further include a sensor provided in thedevice, and on an outer circumference surface of the actuator body, ascrew that is screwed with a screw formed on the valve body and an innercircumference surface of the casing may be formed and a wiring groovethrough which wiring drawn out from the sensor passes may be formed in aportion with which the valve body and the casing are screwed, and thewiring drawn out from the sensor may be routed into the casing throughthe wiring groove.

The fluid control device may further include a holding member that isprovided in the casing and holds the information processing module in aspace formed on an upper side of the introduction pipe in the casing,the holding member being provided with a through hole through which thewiring drawn from the sensor passes.

Furthermore, a fluid control apparatus may include the above-describedfluid control device.

Advantageous Effects of Invention

According to the present invention, the fluid control device can bedownsized, while the member for detecting abnormality of the fluidcontrol device is incorporated in the fluid control device. Furthermore,a result of detecting an abnormality of the fluid control device can beeasily checked from the outside. Furthermore, a cause of abnormalityand/or data with which abnormality can be predicted can be collected tobe analyzed. Furthermore, abnormality can be predicted based on a resultof the analysis, and prediction can be compared with the actual resultto improve the prediction accuracy. Furthermore, only a dynamic sensormeasurement value during a valve operation can be used for the learning,whereby the dimensional quantity of the learning can be reduced toreduce a calculation cost, without compromising the accuracy.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an external perspective view of a fluid control deviceaccording to an embodiment of the present invention, and includes (a)that is a view from a front side and (b) that is a view from a backside.

FIG. 2 is a partial perspective view of the fluid control deviceaccording to the present embodiment, and includes (a) illustrating avalve closed state, and (b) illustrating a valve open state.

FIG. 3 is an external perspective view of an actuator body of the fluidcontrol device according to the present embodiment.

FIG. 4 is a diagram illustrating a process of attaching a cover to theactuator body of the fluid control device according to the presentembodiment, and includes (a) illustrating a state before the attachmentand (b) illustrating a state after the attachment.

FIG. 5 is a partially enlarged view illustrating a fixing memberattached to the fluid control device according to the presentembodiment.

FIG. 6 is a diagram illustrating the fluid control device according tothe present embodiment taken along a line indicated by arrows A-A.

FIG. 7 is an external perspective view illustrating a holding memberattached to the fluid control device according to the presentembodiment.

FIG. 8 is a partially transparent view of the fluid control deviceaccording to the present embodiment.

FIG. 9 is a diagram illustrating a wiring path of the fluid controldevice according to the present embodiment taken along a line indicatedby arrows B-B, and includes (a) that is a transparent view of a valvebody and a casing, and (b) that is a transparent view of the valve body.

FIG. 10 is an external perspective view illustrating a fluid controlapparatus including the fluid control device according to the presentembodiment.

FIG. 11 is a functional block diagram illustrating functions of thefluid control device according to the present embodiment.

FIG. 12 is a functional block diagram illustrating functions of thefluid control device according to the present embodiment and a serverconfigured to be able to communicate with the fluid control device.

FIG. 13 is a functional block diagram illustrating functions of a fluidcontrol device according to a modification of the present embodiment anda server configured to be able to communicate with the fluid controldevice.

FIG. 14 is a functional block diagram illustrating functions of a fluidcontrol device according to a modification of the present embodiment anda server configured to be able to communicate with the fluid controldevice.

FIG. 15 is a graph illustrating time required for opening/closing thefluid control device.

DESCRIPTION OF EMBODIMENTS First Embodiment

A fluid control device according to a first embodiment of the presentinvention will be described below with reference to the drawings.

In the following description, the directions of members and the like maybe referred to as upper, lower, left, and right depending on thedirections in the drawings for the sake of convenience, but these do notlimit the directions of members or the like in the actual situation oran embodiment of the present invention.

As illustrated in FIG. 1, a fluid control device 1 according to thepresent embodiment incorporates a sensor for detecting an abnormality ofthe fluid control device 1, in particular, leakage of fluid, a moduleinvolved in driving the sensor, and the like, and has an upper sideprovided with a panel that displays an operation status and anextraction port for extracting information related to the operationstatus.

As illustrated in FIG. 2, the fluid control device 1 according to thepresent embodiment includes a valve body 11, a substantially cylindricalactuator body 12 provided at the upper end of the valve body 11, and acasing 13 provided at the upper end of the actuator body 12.

In the valve body 11, an inflow path 111 a through which a fluid flowsin, an outflow path 111 b through which the fluid flows out, and a valvechamber 111 c that communicates with the inflow path 111 a and theoutflow path 111 b are provided. The inflow path 111 a, the outflow path111 b, and the valve chamber 111 c integrally form a flow path 111through which the fluid flows.

Furthermore, an annular seat 112 is provided on a circumference of aportion where the inflow path 111 a and the valve chamber 111 ccommunicate with each other. Furthermore, on the seat 112, a diaphragm113 is provided which causes the fluid to flow from the inflow path 111a to the outflow path 111 b and blocks the flow by being brought intocontact with and separated from the seat 112.

The diaphragm 113 is a disk-shaped member made of metal such asstainless steel or a NiCo-based alloy and/or a fluorine-based resin, andfunctions as an isolation member that isolates the flow path 111 and aspace S1 from each other. Upon being released from pressure from a disk124 due to air serving as driving pressure supplied, the diaphragm 113has a center portion displaced in a direction away from the seat 112 dueto restoration force thereof or pressure in the flow path 111, to beseparated from the seat 112. As a result, the valve chamber 111 c isopened, whereby the inflow path 111 a and the outflow path 111 bcommunicate with each other.

On the other hand, upon being pressed toward the disk 124 with thesupply of the air serving as the driving pressure terminated, thediaphragm 113 has the center portion displaced in a direction to be incontact with the seat 112, to be in contact with the seat 112. As aresult, the valve chamber 111 c is closed, and a flow between the inflowpath 111 a and the outflow path 111 b is blocked.

As illustrated in FIG. 1(b), the valve body 11 has a side surfaceprovided with a leak port LP configured as a through hole through whichthe space S1 and the outside communicate with each other. The leak portLP may be closed when a pressure sensor 41 described later detects thepressure in the space S1 to detect an abnormality in the fluid controldevice 1. When the leak port LP is closed, the space S1 is in anairtight state.

The leak port LP also functions as a test port when airtightness of theflow path 111 is inspected in finished product inspection for the fluidcontrol device 1. This finished product inspection is performed withinert helium gas (He) or the like circulated in the flow path 111.

Generally, a bellows is used as the isolation member in addition to thediaphragm 113 according to this example. However, the bellows canachieve a large stroke (flow rate range) but involves a large change inan internal volume of the actuator body, requiring a breathing port(corresponding to the leak port LP in this example) to be opened duringan opening/closing operation of the fluid control device.

On the other hand, a change in the internal volume the actuator body 12is small with the direct diaphragm structure as in the present example,that is, a structure in which the fluid flows from the inflow path 111 ato the outflow path 111 b or the fluid flow is blocked with thediaphragm 113 brought into contact with or separated from the seat 112.Thus, the fluid control device 1 can perform the opening/closingoperation without problem, even when the leak port LP is closed fordetecting the pressure change with the pressure sensor 41 describedlater attached in the actuator body 12 for detecting an abnormality ofthe fluid control device 1.

As illustrated in FIG. 3, the actuator body 12 includes a screw portion121 screwed to the valve body 11, an exposed portion 122 exposed to theoutside, and a screw portion 123 screwed to a cap body 131 of the casing13.

The screw portion 121 has a threaded outer circumference surface to bescrewed with a threaded inner circumference surface of the valve body11.

Furthermore, the screw portion 123 also has a threaded outercircumference surface to be screwed with the inner circumference surfaceof the cap body 131.

Wiring grooves 121 a, 122 a, and 123 a, through which wiring can beprovided, are formed on the outer circumference surface of the actuatorbody 12 along an axial direction. The wiring grooves 121 a and 123 aprovided on the outer circumference surfaces of the screw portions 121and 123 have groove bottoms at positions deeper than the grooves of thescrews formed on the outer circumference surfaces. Thus, the screwportions 121 and 123 can be screwed with the valve body 11 and the capbody 131, respectively, without causing breaking or the like of thewiring provided through the wiring grooves 121 a and 123 a.

Screw holes 122 b for attaching the cover 1221 are provided on bothsides of the wiring grooves 122 a provided on the outer circumferencesurface of the exposed portion 122.

As illustrated in FIG. 4, covers 1221 that are member that covers thewiring grooves 122 a are each provided with a through hole 1221 acorresponding to the screw hole 122 b of the actuator body 12. Thewiring provided through the wiring groove 122 a of the actuator body 12is covered with the cover 1221, with a screw 122 c screwed into thescrew hole 122 b of the actuator body 12 through the through hole 1221 aof the cover 1221.

The actuator body 12 incorporates the disk 124 for pressing thediaphragm 113, a pressing adapter 125 for pressing the circumferenceedge of the diaphragm 113, a piston 126 that slides up and down, and aspring 127 that is wound on the outer circumference surface of thepiston 126 and biases the piston 126 downward.

The pressing adapter 125 presses the circumference edge of the diaphragm113 from above, to prevent the fluid flowing in the flow path 111 fromleaking into the actuator body 12 from a portion around a circumferenceedge portion of the diaphragm 113.

The piston 126 causes the diaphragm 113 to be in contact with andseparated from the seat 112 via the disk 124.

A substantially central portion of the piston 126 in the axial directionexpands to be in a disk shape, so that this portion serves as anincreased diameter portion 1261. The piston 126 receives the biasingforce of the spring 127, on the upper surface side of the increaseddiameter portion 1261. Furthermore, a driving pressure introductionchamber S2 is formed between the upper end surface of the actuator body12 and a lower end side of the increased diameter portion 1261.

Furthermore, in the piston 126, a driving pressure introduction path 126b is formed through which an opening 126 a formed on the upper endsurface and the driving pressure introduction chamber S2 formed on thelower end side of the increased diameter portion 1261 communicate witheach other.

An introduction pipe 21 for introducing a driving pressure from theoutside is connected to the opening 126 a of the piston 126.

A holding member with a small diameter is provided on the outercircumference surface of the increased diameter portion 1261 of thepiston 126, and holds an O ring 1262. The O ring 1262 seals between theouter circumference surface of the piston 126 and the innercircumference surface of the actuator body 12.

Furthermore, a holding member having a small diameter is also providedon the lower end side of the piston 126, and holds an O ring 1263. The Oring 1263 seals between the outer circumference surface of the piston126 and the inner circumference surface of the actuator body 12. Thus, aspace S1 partitioned by the diaphragm 113 and the O ring 1263 is formedat a portion where the disk 124 in the actuator body 12 moves up anddown.

Here, a through hole 12 a is formed in the screw portion 121 of theactuator body 12. The through hole 12 a enables the space S1 tocommunicate with the outside through the leak port LP provided in thevalve body 11. When the leak port LP is closed, the space S1 is isolatedfrom the outside to be in the airtight state.

A space formed by the O ring 1262 and the O ring 1263 forms the drivingpressure introduction chamber S2 communicating with the driving pressureintroduction path 126 b in the piston 126.

Air is introduced into the driving pressure introduction chamber S2 fromthe introduction pipe 21 through the driving pressure introduction path126 b in the piston 126. When the air is introduced into the drivingpressure introduction chamber S2, the piston 126 is pushed upwardagainst the biasing force of the spring 127. As a result, the diaphragm113 is separated from the seat 112 so that a valve open state isachieved, whereby the fluid flows.

On the other hand, when the introduction of the air into the drivingpressure introduction chamber S2 is terminated, the piston 126 is pusheddownward due to the biasing force of the spring 127. As a result, thediaphragm 113 comes into contact with the seat 112 so that a valveclosed state is achieved, whereby the flow of the fluid is blocked.

The casing 13 is a substantially cylindrical member with one end closed,is disposed on the upper end of the actuator body 12, incorporates aninformation processing module 5 that processes data obtained by apressure sensor 41, a temperature sensor 42, and a limit switch 43, andperforms the other like operation.

The casing 13 according to the present example includes three membersthat are the cap body 131, an actuator cap 132, and a cap top 133.

The cap body 131 is a substantially cylindrical member, and is disposedon the upper end of the actuator body 12. The outer circumferencesurface of an upper end portion of the actuator body 12 and the innercircumference surface of a lower end portion of the cap body 131 arethreaded in a corresponding manner. Thus, the cap body 131 is fixed onthe actuator body 12 with these surfaces screwed with each other.

A fixing member 1311 is attached to the inner circumference surface ofthe cap body 131.

The fixing member 1311 is a member for fixing the limit switch 43described later, and has a substantially rectangular parallelepipedshape. The fixing member 1311 is provided with a screw hole 1311 a forattaching the fixing member 1311 to the inner circumference surface ofthe cap body 131.

The cap body 131 is provided with a through hole 131 a corresponding tothis. The fixing member 1311 is fixed with a screw 1311 b insertedthrough the through hole 131 a of the cap body 131 from the outside andscrewed to the screw hole 1311 a of the fixing member 1311 provided onthe inner circumference surface of the cap body 131.

As illustrated in FIG. 5, the fixing member 1311 is provided with awiring groove 1311 c through which wiring, leading from the limit switch43 described later, is provided. Thus, the wiring groove 1311 c canreceive the wiring.

The actuator cap 132 is a substantially disk-shaped member disposed onthe upper end of the cap body 131, and divides the casing 13 into upperand lower parts.

The spring 127 is sandwiched between the lower end side of the actuatorcap 132 and the upper surface of the increased diameter portion 1261 ofthe piston 126.

Furthermore, a substantially cylindrical through hole 132 a, extendingtoward the piston 126, is provided at a position corresponding to theopening 126 a of the piston 126, which is at the center of the actuatorcap 132. One end of the introduction pipe 21 is inserted into thethrough hole 132 a.

Furthermore, as illustrated in FIG. 6, through holes 132 b through whichwiring is provided are provided on the outer side of the through hole132 a.

The cap top 133 is a substantially cap-shaped member disposed on theupper end of the actuator cap 132, and can has a hollow internal portionthat can accommodate the information processing module 5.

The cap top 133 has an upper surface provided with through holes 133 aand 133 b.

A liquid crystal panel or the like for displaying data acquired by thepressure sensor 41, the temperature sensor 42, and the limit switch 43,a result of the processing based on the data, and the like is fitted tothe through hole 133 a.

A warning lamp such as a light emitting diode (LED) lamp is fitted inthe through hole 133 b. When the result of the processing based on thedata acquired by the pressure sensor 41, the temperature sensor 42, andthe limit switch 43 indicates that an abnormality has occurred in thefluid control device 1, the warning lamp is used for issuing anotification indicating the abnormality.

As illustrated in FIG. 1, the cap top 133 has a side surface providedwith a through hole 133 c. The through hole 133 c is provided with aconnector for connecting to an external device for extraction of thedata acquired by the temperature sensor 42 and the limit switch 43, theresult of the processing based on the data, and the like

A through hole 133 d is provided in a portion, of the side surface ofthe cap top 133, near the opening on the actuator cap 132 side whilebeing separated from the upper surface of the cap top 133. Theintroduction pipe 21 is inserted into the through hole 133 d.

The introduction pipe 21 is a pipe for introducing the air serving asthe driving pressure from the outside into the fluid control device 1,and is made of a nylon tube or the like to have flexibility.

The introduction pipe 21 has one end inserted into the driving pressureintroduction path 126 b from the opening 126 a of the piston 126. An Oring 24 is held between the outer circumference surface of the distalend of the introduction pipe 21 inserted into the driving pressureintroduction path 126 b and the inner circumference surface of thedriving pressure introduction path 126 b. The O ring 24 seals betweenthe inner circumference surface of the driving pressure introductionpath 126 b and the outer circumference surface of the introduction pipe21 inserted into the driving pressure introduction path 126 b. Thus, theair introduced from the introduction pipe 21 is introduced into thedriving pressure introduction chamber S2 through the driving pressureintroduction path 126 b in the piston 126, without leaking.

Furthermore, the fixing member 23 for fixing the introduction pipe 21 isfitted to the through hole 132 a of the actuator cap 132. The fixingmember 23 is a substantially cylindrical member and has a through holehaving an inner diameter that is substantially the same as the outerdiameter of the introduction pipe 21. The introduction pipe 21 isinserted through this through hole. Furthermore, the fixing member 23has a circumference edge, on the side of the opening 126 a, protrudingto be in a claw shape, whereby the introduction pipe 21 inserted intothe fixing member 23 is fixed so as not to be pulled out.

The other end of the introduction pipe 21, whose one end is insertedinto the driving pressure introduction path 126 b from the opening 126 aof the piston 126, is drawn out from the through hole 133 d of the captop 133. A one-touch fitting 22 is attached to the distal end of theother end.

A holding member 3 is held in the vicinity of the opening on the side ofthe actuator cap 132 of the cap top 133.

As illustrated in FIG. 6, the holding member 3 is a substantiallyring-shaped flexible member made of resin, and supports the informationprocessing module 5 upward from the lower surface side so that theinformation processing module 5 is held within the cap top 133.

Through holes 3 a and 3 b are formed through the holding member 3 in avertical direction. Wiring, connecting the pressure sensor 41, thetemperature sensor 42, and the limit switch 43 to the informationprocessing module 5, can be provided through the through holes 3 a and 3b.

The holding member 3 has an outer circumference edge provided with aprotrusion 31 formed to be in a claw shape protruding outward. An outerdiameter of the holding member 3 including the protrusion 31 issubstantially equal to or slightly larger than the inner diameter of thehollow portion of the cap top 133. Thus, as illustrated in FIG. 7, whenthe holding member 3 is attached to the inner circumference surface ofthe cap top 133, the holding member 3 is held on the inner circumferencesurface of the cap top 133 by the protrusion 31 in a strutting manner.

Furthermore, the holding member 3 is held at a position that is in thevicinity of the opening on the side of the actuator cap 132 of the captop 133 and above the position where the through hole 133 d is provided.

Thus, the information processing module 5 is held on the holding member3 so that the introduction pipe 21 is not crushed by the informationprocessing module 5.

In the present embodiment, the diameter of the through hole 3 a islarge, and the holding member 3 is formed to have a substantially ringshape, so that the holding member 3 can be easily bent and easilyattached to the inner circumference surface of the cap top 133.

On the other hand, in another embodiment, the holding member 3 may havea substantially disk shape and be provided with only a small holethrough which the wiring is routed. Furthermore, the holding member 3can be a member integrally formed with the cap top 133. When the holdingmember 3 is integrally formed with the cap top 133, the entire topsurface of the cap top 133 may be openable/closable so that theinformation processing module can be provided to the inside portion fromthe top surface.

In the fluid control device 1, the pressure sensor 41, the temperaturesensor 42, and the limit switch 43 are attached to predeterminedlocations, and the information processing module 5 that processes datadetected by the pressure sensor 41, the temperature sensor 42, and thelimit switch 43 is accommodated.

In the space S1, the pressure sensor 41 for detecting the pressure inthe space S1 and the temperature sensor 42 for measuring the temperatureof the fluid are attached.

The pressure sensor 41 includes a pressure-sensitive element thatdetects a pressure change in the space S1, a conversion element thatconverts a detected value of the pressure detected by thepressure-sensitive element into an electrical signal, and the like.

In this embodiment, a pressure change in the space S1 is detected by thepressure sensor 41 so that an abnormality in the fluid control device 1due to fluid leakage or the like is detected. Note that a capacitormicrophone unit can be used as the pressure sensor 41. Specifically, thecapacitor microphone unit has a diaphragm that vibrates upon receiving asound wave, and a counter electrode disposed opposite to the diaphragm,and can obtain a sound signal as a result of converting a change in astatic capacity between the diaphragm and the counter electrode into avoltage change. This capacitor microphone unit becomes nondirectional(omnidirectional) once the air chamber provided on the back side of thediaphragm is closed. The capacitor microphone unit in thisnondirectional state operates to capture a change in sound pressure dueto sound waves in any directions, and thus can be used as the pressuresensor 41.

The temperature sensor 42 measures the temperature at the installedlocation. The installed location is near the flow path 111, and thus thetemperature at the installation location can be regarded as thetemperature of the fluid flowing in the flow path 111.

The limit switch 43 is attached inside the cap body 131 of the casing13.

The limit switch 43 is fixed in the cap body 131 by the fixing member1311 attached to the inner circumference surface of the cap body 131.

The limit switch 43 is fixed above the increased diameter portion 1261of the piston 126, and the switch is switched according to the verticalmovement of the piston 126. That is, when the piston 126 is pushedupward at the time of valve opening, the limit switch 43 is pressed bythe increased diameter portion 1261 of the piston 126. On the otherhand, when the piston 126 is pressed downward at the time of valveclosing, the limit switch 43 is released from the state of beingpressing by the increased diameter portion 1261 of the piston 126.

Based on the pressing of the limit switch 43 due to the verticalmovement of the piston 126, the number of opening/closing times and thefrequency of opening/closing of the fluid control device 1 can bedetected. Furthermore, when a plurality of the limit switches 43 areprovided, the opening/closing speed of the fluid control device 1 can bedetected.

Now, how the wiring connecting the pressure sensor 41, the temperaturesensor 42, and the limit switch 43 to the information processing module5 is routed will be described with reference to FIG. 8 and FIG. 9.

First of all, the wiring leading from the pressure sensor 41 and thetemperature sensor 42 is drawn into the cap body 131 through the wiringgrooves 121 a, 122 a, and 123 a formed on the outer circumferencesurface of the actuator body 12.

The wiring grooves 121 a, 122 a, and 123 a are covered by the valve body11, the cover 1221, and the cap body 131, respectively, and thus thewiring routed from the pressure sensor 41 and the temperature sensor 42into the cap body 131 will not be exposed to the outside.

Further, the wiring leading from the limit switch 43 is fitted into thewiring groove 1311 c of the fixing member 1311 illustrated in FIG. 5 andis also drawn into the cap body 131.

The wiring of the pressure sensor 41, the temperature sensor 42, and thelimit switch 43 drawn into the cap body 131 is routed into the cap top133 through the through hole 132 b provided in the actuator cap 132, tobe connected to the information processing module 5.

As described above, in the fluid control device 1, the wiring is routedwithout being exposed to the outside or coming into contact with amovable member such as the piston 126 in the fluid control device 1, andthus can be prevented from breaking or the like by coming into contactwith another device and the like.

The information processing module 5 includes a Large-Scale Integration(LSI) that processes the data detected by the pressure sensor 41, thetemperature sensor 42, and the limit switch 43. The informationprocessing module 5 may include a driving power source and the like,such as a coin battery, supplying power required for driving thepressure sensor 41, the temperature sensor 42, and the limit switch 43.

As illustrated in FIG. 10, a plurality of the fluid control devices 1having the above configuration are generally integrated to form a fluidcontrol apparatus 10.

In the fluid control apparatus 10 thus including the plurality of fluidcontrol devices 1, the fluid control devices 1 are densely arranged.Thus, the panel that displays data about each fluid control apparatus 10and the port for connecting to an external device such as a USB memoryso that information can be extracted from the information processingmodule 5 are preferably provided on the upper surface or at least on theupper side of the information processing module 5. In particular, thepanel for displaying data is difficult to view unless viewed from thetop.

Next, a description is given on processing, executed in the fluidcontrol device 1 according to the present embodiment, for determiningwhether the fluid control device 1 has an abnormality based on dataacquired by the pressure sensor 41, the temperature sensor 42, and thelimit switch 43 that are attached inside.

As illustrated in FIG. 11, the information processing module 5 accordingto the present embodiment includes a determination processing unit 51, acorrection processing unit 52, an information display unit 53, a warningdisplay unit 54, and an information supply unit 55.

The determination processing unit 51 is a functional unit that executesprocessing of determining whether the fluid control device 1 has anabnormality or not based on data acquired by the pressure sensor 41, thetemperature sensor 42, and the limit switch 43.

The determination processing unit 51 can execute the processing ofdetermining whether the fluid control device 1 has an abnormality or notdue to leakage of the fluid into the space S1 and the like, by comparinga predetermined threshold, held in a reference table or the like, with adetected value of the pressure detected by the pressure sensor 41.Specifically, the predetermined threshold is set to be a limit value ofthe pressure in the space S1 anticipated with opening/closing of thevalve in the fluid control device 1 during the normal use. The fluidcontrol device 1 is determined to have an abnormality when the detectedvalue of the pressure in the space S1 exceeds the threshold. Theappropriateness of the determination is backed by the fact that thedetected value of the pressure in the space S1 exceeding the thresholdcan be regarded as a result of the pressure rise in the space S1 causedby leakage of the fluid into the space S1 due to breaking of thediaphragm 113 or the like or as a result of pressure drop in the spaceS1 caused by pressure drop in the flow path 111.

The correction processing unit 52 corrects the predetermined threshold,referred to by the determination processing unit 51 to determine whetherthe fluid has leaked into the space S1, based on the temperature of thefluid measured by the temperature sensor 42.

When the correction processing unit 52 thus corrects the predeterminedthreshold, the determination processing unit 51 executes the processingof determining whether the fluid control device 1 has an abnormality ornot due to leakage of the fluid into the space S1 and the like, bycomparing the corrected threshold with a detected value of the pressuredetected by the pressure sensor 41.

The information display unit 53 is a functional unit that displaysinformation to be viewable to the outside. The information includesinformation related to the pressure in the space S1, the temperature ofthe fluid, the open/close state of the fluid control device 1, and thenumber of opening/closing times acquired by the pressure sensor 41, thetemperature sensor 42, and the limit switch 43, as well as informationrelated to the result of the determination processing executed by thedetermination processing unit 51. The information display unit 53 isimplemented by a liquid crystal panel or the like, and is fitted to thethrough hole 133 a of the cap top 133.

Thus, the condition of the fluid control device 1 can be easilyrecognized from the outside. In particular, in the fluid controlapparatus 10 in which the fluid control devices 1 are accumulated, theinformation display unit 53 is disposed on the upper surface side wherethe fluid control devices 1 can be most easily identified, making iteasier to check the information displayed.

The warning display unit 54 is a functional unit that emits light inresponse to the result of the determination processing, executed by thedetermination processing unit 51, indicating that the fluid controldevice 1 has an abnormality. The warning display unit 54 is implementedby a light emitter such as an LED and is fitted to the through hole 133b of the cap top 133.

Thus, with the warning display unit 54 issuing a warning when anabnormality occurs in the fluid control device 1, the abnormality can beeasily recognized.

The information supply unit 55 is a functional unit for supplying, tothe outside, data acquired by the pressure sensor 41, the temperaturesensor 42, and the limit switch 43, and the information related to theresult of the determination by the determination processing unit 51.This functional unit is used while being connected to an externalcomputer a USB cable, and a USB connector therefor is used forperforming cable insertion and removal through the through hole 133 c onthe side surface of the cap top 133.

According to the fluid control device 1 having the above configuration,an abnormality of the fluid control device 1 caused by the leakage offluid into the space S1 and the like can be detected based on thecomparison between the pressure in the space S1 detected by the pressuresensor 41 and the predetermined threshold.

With the fluid control device 1 detecting the pressure in the space S1,and detecting an abnormality of the fluid control device 1 by comparingthe predetermined threshold value with the detected value, anabnormality involving internal pressure of the closed space S beingnegative pressure can also be detected.

Furthermore, when the pressure in the space S1 changes due totemperature change of the fluid, abnormality of the fluid control device1 can be detected with this pressure change distinguished from thechange in the pressure in the space S1 due to the abnormality of thefluid control device 1 such as the leakage of the fluid.

In this example, the abnormality of the fluid control device 1 isdetected by detecting the pressure in the space S1 partitioned by thediaphragm 113 and the O ring 1262. Note that the space S1 may be anyspace defined by the diaphragm 113 in the fluid control device 1, sothat by detecting the pressure in the space S1, an abnormality of thefluid control device 1 such as breakage of the diaphragm 113 and thelike can be detected.

The present embodiment may be modified in the following manner.Specifically, opening and closing of the fluid control device 1 may bedetected with a driving pressure sensor that detects the drivingpressure of the fluid control device 1 provided instead of the limitswitch that detects the opening and closing of the fluid control device1.

In this case, while the opening and closing operation of the fluidcontrol device 1 is in progress, determination can be made on a pressurechange in the space S1 caused by the fluid leakage or the like. Thus, anappropriate transfer function for converting driving pressure into arequired correction value may be obtained through experiments, tocorrect transient pressure change in the space S1 while the piston 126is moving.

On the other hand, it can be determined that the piston 126 or thepressure sensor 41 is failed, if the detected value obtained by thepressure sensor 41 does not rise despite the detected value of thedriving pressure sensor indicating a scenario where the pressure in thespace S1 is supposed to rise.

In the above-described example, the panel for displaying information isfitted to the through hole 133 a on the upper surface of the cap top133. Additionally, the through hole 133 a can be provided with aninformation extraction port such as a USB connector.

The fluid control device according to the present embodiment detects anabnormality of the fluid control device 1 using the determinationprocessing unit 51 and the correction processing unit 52 included in theinformation processing module 5 incorporated in the fluid controldevice, and provides information indicating the abnormality to theoutside using the information display unit 53, the warning display unit54 or the information supply unit 55. Alternatively, the device may beconfigured to provide the information to a server that is configured tobe capable of communicating with the fluid control device through anetwork.

FIG. 12 illustrates an example in which the fluid control device 1 and aserver 71 can communicate with each other through networks NW1 and NW2.

In this example, the information processing module 5 includes acommunication processing unit 56 so that the fluid control device 1 cantransmit and receive data to and from the server 71. The communicationprocessing unit 56 transmits the determination result obtained by thedetermination processing unit 51 to the server 71, and transmits dataacquired by the pressure sensor 41, the temperature sensor 42, and thelimit switch 43 if necessary. In this example, the relay device 6 isprovided between the fluid control device 1 and the server 71, and theinformation from the fluid control device 1 is provided to the server 71via the relay device 6.

Specifically, the data transmitted by the communication processing unit56 is temporally transmitted to the relay device 6 via the network NW1implemented by wireless communications such as Bluetooth (registeredtrademark), infrared communication, or Zigbee (registered trademark),for example. Then, the data is transmitted from the relay device 6 tothe server 71 via the network NW2 implemented by a wireless or wiredlocal area network (LAN) or the like.

The communication processing unit 56 can transmit the determinationresult obtained by the determination processing unit 51 at apredetermined interval appropriately set, such as one hour or one day.With the information thus transmitted at a predetermined interval, powerconsumption can be reduced.

Furthermore, as illustrated in FIG. 10, when the plurality of the fluidcontrol devices 1 are integrated to form the fluid control apparatus 10,the communication processing unit 56 of the information processingmodule 5 of each fluid control device 1 can transmit the determinationresult obtained by the determination processing unit 51, together withself identification information with which the server 71 can identifythe fluid control device 1, at a timing different among the fluidcontrol devices 1.

With the self identification information enabling the fluid controldevices 1 to be individually identified transmitted to the server 71,which one of the plurality of fluid control devices forming the fluidcontrol apparatus 10 has an abnormality can be determined.

Furthermore, with the determination result is transmitted to the server71 at a timing different among the fluid control devices 1, a problem ofpacket collision can be avoided, and temporally processing overload isless likely to occur compared with a case that the results aretransmitted at once. Furthermore, unlike in the case that the resultsare transmitted at once, different wireless channels, used for datatransmission, need not to be prepared for the respective fluid controldevices 1. Thus, a large number of channels need not to be prepared. Inparticular, in a configuration where the network NW1 is implemented byBluetooth (registered trademark), the number of devices that can besimultaneously connected is limited (usually seven). Thus, in such aconfiguration, the transmission timing may be varied to enable the useof the fluid control devices 1 exceeding the number of devices that canbe simultaneously connected.

The server 71 includes hardware resources including: a CentralProcessing Unit (CPU); a computer program executed by the CPU; a RandomAccess Memory (RAM) and a Read Only Memory (ROM) that stores thecomputer program and predetermined data; and an external storage devicesuch as a hard disk drive.

The server 71 includes a communication processing unit 711 for receivingthe determination result, for fluid leakage in the space S1 of the fluidcontrol device 1, via the relay device 6. The information received bythe server from the fluid control device 1 is appropriately provided toa terminal used by the supervisor or the like of the fluid controldevice 1, in response to a request from the terminal used by thesupervisor.

The relay device 6 receives data from the fluid control device 1 via thenetwork NW1 and transmits the received data to the server 71 via thenetwork NW2.

In the present embodiment, the relay device 6 is interposed between thefluid control device 1 and the server 71. Alternatively, the fluidcontrol device 1 and the server 71 can be configured to be capable ofdirectly performing data communications.

With the above configuration, the information related to the abnormalityof the fluid control device 1 is collected in the server 71, so that thesupervisor of the fluid control device 1 can easily monitor theoperation status of the fluid control device 1.

FIG. 13 illustrates an example in which a fluid control device 8 and aserver 72 can communicate with each other through a network.

In the description of this example, the fluid control device 8 has thesame structure as the fluid control device 1, and members, functionalunits, and/or the like denoted with reference numerals (symbols) thatare the same as those in the above-described example have or execute thefunctions that are the same as those of the members, the functionalunits, and the like unless otherwise stated, and thus the descriptionthereof will be omitted.

In this example, the server 72 includes a determination processing unit721 and a correction processing unit 722 having the same functions asthe determination processing unit 51 and the correction processing unit52 of the information processing module 5 of the fluid control device 1described above. Thus, an abnormality of the fluid control device 8 dueto the fluid leakage in the space S1 or the like is determined on theside of the server 72.

The fluid control device 8 transmits the data obtained by the pressuresensor 41, the temperature sensor 42, and the limit switch 43 to theserver 72, using the communication processing unit 56 of the informationprocessing module 9.

The server 72 includes hardware resources including: a CPU; a computerprogram executed by the CPU; a RAM and a ROM that stores the computerprogram and predetermined data; and an external storage device such as ahard disk drive, and provides functional units including thedetermination processing unit 721, the correction processing unit 722,and a communication processing unit 723.

As in the case of the determination processing unit 51, thedetermination processing unit 721 executes the processing of determiningwhether the fluid control device 8 has an abnormality or not due toleakage of the fluid into the space S1 and the like, by comparing apredetermined threshold, held in a reference table or the like, with adetected value of the pressure detected by the pressure sensor 41.Furthermore, when the predetermined threshold value is corrected by thecorrection processing unit 722, processing of determining an abnormalityof the fluid control device 8 is executed based on the correctedthreshold value.

As in the case of the correction processing unit 52, the correctionprocessing unit 722 corrects the predetermined threshold, referred to bythe determination processing unit 51 to determine whether the fluid hasleaked into the space S1, based on the open/close state of the fluidcontrol device 8 detected by the limit switch 43 and/or temperature ofthe fluid measured by the temperature sensor 42. Note that, in thisexample, the information related to the open/close state of the fluidcontrol device and the temperature of the fluid measured by thetemperature sensor 42 is supplied from the fluid control device 8 to theserver 72 through the networks NW1 and NW2.

The communication processing unit 723 receives information related tothe open/close state of the fluid control device 8 and the temperatureof the fluid measured by the temperature sensor 42 from the fluidcontrol device 8 via the relay device 6.

With the above configuration, the processing of determining theabnormality of the fluid control device 8 is executed on the side of theserver 72, so that the information processing module 9 installed in thefluid control device 8 can be simplified and maintenance such asdebugging of the program executed by the determination processing unit721 and/or the correction processing unit 722 can be easily performed.

Furthermore, in the present example, when the processing of determiningan abnormality of the fluid control device 8 on the side of the server72 results in the fluid control device 8 determined to have abnormality,information indicating that the occurrence of the abnormality istransmitted to the fluid control device 8, and the information displayunit 53 or the warning display unit 54 of the fluid control device 8 maybe caused to display the abnormality or issue a warning.

In the example in which the fluid control device 8 and the server 72described above are configured to be able to communicate via thenetworks NW1 and 2, information acquired by the pressure sensor 41, thetemperature sensor 42, and the limit switch 43 of the fluid controldevice 8 can be aggregated. Thus, data mining can be performed based onthe aggregated information.

A system for analyzing the operation of the fluid control device 8 willbe described as a modification of the above-described embodiment inwhich the fluid control device 8 and the server 72 are configured to beable to communicate with each other.

Also in this example, the fluid control device 8 includes the pressuresensor 41, the temperature sensor 42, and the limit switch 43 serving asan operation information acquisition mechanism for acquiring operationinformation about the fluid control device 8. Thus, the fluid controldevice 8 acquires the operation information about the fluid controldevice 8 such as the pressure in the space S1, the temperature of thefluid, the number of opening and closing times, and opening/closingfrequency of the fluid control device 8 (a plurality of limit switchescan be used to detect the opening and closing speed).

On the other hand, in order to analyze the operation of the fluidcontrol device 8, it is also effective to provide a predeterminedoperation information acquisition mechanism to acquire other types ofoperation information. Specific examples of such information include theusage period of the fluid control device 8, the temperature and humidityof the external environment of the fluid control device 8, the thrust ofthe piston 126, the average moving speed and vibration of the piston126, and the internal stress and the hardness of components of the fluidcontrol device 8.

FIG. 14 illustrates a configuration of the operation analysis system forthe fluid control device according to this example.

In this operation analysis system, the server 72 is an informationprocessing apparatus that executes data mining based on the informationacquired from the fluid control device 8, and includes an informationcollection unit 724, an information storage unit 725, an informationextraction unit 726, a correlation analysis unit 727, and an abnormalityprediction unit 728, as well as the determination processing unit 721,the correction processing unit 722, and the communication processingunit 723 described above.

The information collection unit 724 issues a request for transmittingthe operation information to the fluid control device 8, through thecommunication processing unit 723, to collect the information. Theinformation collection unit 724 issues a request for supplyinginformation related to the abnormality determination result to the fluidcontrol device 8 from the abnormality determination processing unit 721,to collect the information related to the abnormality determinationresult.

The operation information about the fluid control device 8 may becollected not only from the fluid control device 8 but may also becollected from other devices. For example, the information may becollected from a terminal that measures the temperature and humidity ofthe location where the fluid control device 8 is installed, orinformation input by an administrator of the fluid control device 8using an administrator terminal may be collected.

The information storage unit 725 is a storage unit that stores theoperation information collected from the fluid control device 8 and theabnormality determination result obtained by the fluid control device 8.

The information extraction unit 726 refers to the information storageunit 725, and selectively extracts for each of the fluid control device8, an analysis target including: another operation information withpredetermined operation information being the same; and informationrelated to the determination result.

For example, with regard to the operation information of the pluralityof fluid control devices 8, information related to the operation time atthe same number of valve opening/closing times (e.g., 10 million times)and the abnormality determination result in the corresponding operationtime are extracted.

In particular, from the operation information data about the fluidcontrol device 8, data in a predetermined period of time before andafter switching of the open/closed state of the fluid control device 8,detected by a change of the limit switch 43 and/or the pressure sensor41, is extracted to be input data. This reflects the fact that measuringchanges in dynamic sensor measurement values during a valve operation iseffective in prediction of abnormality. With the dimensional quantity ofinput data reduced, a calculation cost for learning described later canbe reduced. The predetermined period may be 100 to 500% of the timeperiod required for opening/closing the fluid control device 8 (thistime period is defined as a time period between a point when the drivingpressure starts to be introduced and a point when the fluid controldevice 8 is completely open, and this time period corresponds to a timeperiod between two dotted lines in FIG. 15), so that data within arequired range can be extracted without waste. Furthermore, by limitingthe data transmission from the fluid control device 8 within this timeperiod in advance, the amount of data to be communicated can be reducedso that power consumption of the fluid control device 8 can be reduced.

The correlation analysis unit 727 analyzes the correlation between thepredetermined operation of the fluid control device 8 and the occurrenceof abnormality, through comparison using the information extracted bythe information extraction unit 726.

First learning is performed as supervised learning, based on pastoperation information about the fluid control device 8 with abnormality,to classify input data into that within a predetermined period beforethe occurrence of the abnormality (hereinafter, referred to as a failurepreceding period), that after the occurrence of the abnormality, andthat during a normal operation before the failure preceding period. Thislearning is performed, for example, through stochastic gradient descent(SGD), using a backpropagation for a model of a neural network, on amodel of a neural network.

Learned model determination performance varies depending on a length ofthe failure preceding period set. Thus, the length of the predeterminedperiod is also a hyper parameter to be adjusted which further includesthe number of layers and the number of nodes of the neural network.These hyperparameters is selectively adjusted by, for example, anoptimization algorithm, so that a value resulting in higherdetermination performance can be selected. On the other hand, dependingon the application, a valve user may desire to recognize a value inanother failure preceding period. In view of this, clustering may beperformed with two or more types failure preceding periods prepared.Also, different classifications may be created for respective types offailure, so that which failure would occur can be predicted within apredetermined period.

For example, with the analysis, with regard to the operation informationabout the plurality of fluid control devices 8, that is, based on anoperation time required for opening/closing the valve for 10 milliontimes and the abnormality determination result within the operationperiod, whether or not the probability of occurrence of abnormality isdifferent between conditions with the number of times the valve isopened and closed being the same (10 million times), that is, between acase where the valve is opened/closed for 10 million times in threemonths and a case where the valve is opened/closed for 10 million timesin three years.

Second learning is performed as unsupervised learning using an autoencoder to detect a special abnormality for which the number of data islimited. The auto encoder performs learning in such a manner that inputdata during the normal operation of the valve is input to a model formedby the neural network, and the same data is output therefrom. By settingthe dimensional quantity of a hidden layer of this neural network to besmaller than the dimensional quantity of the input data and the outputdata, the auto encoder can learn to appropriately restore the originaldata only for a pattern of the input data during the normal operation.

Based on the analysis result obtained by the correlation analysis unit727, the abnormality prediction unit 728 refers to the operationinformation about the fluid control device 8 stored in the informationstorage unit 725, and calculates the abnormality occurrence probabilityof the fluid control device 8 to predict the abnormality of the fluidcontrol device 8.

By causing the learned model obtained by the first learning using themeasured values of the current sensor data as input to perform theclassification, the probability of the valve being in the failurepreceding period can be calculated (first abnormality prediction unit7281). In other words, this probability is an abnormality occurrenceprobability indicating a probability that a failure occurs within apredetermined period.

Furthermore, the input data obtained from the current sensor is passedthrough the auto encoder obtained by the second learning, the output iscompared with original input to calculate a discrepancy between theinput and the output using L2 norm and the like, and the discrepancy iscompared with a predetermined threshold (second abnormality predictionunit 7282). The auto encoder is configured to be capable of restoringthe original data as long as data is that input during the normaloperation, but cannot correctly restore the original data during theabnormal operation, resulting in a large difference between the inputand the output. Thus, an abnormality of the fluid control device 8 canbe detected when the difference exceeds the threshold. This scheme canbe used in tandem with the above-described supervised learning, so thatan abnormal state of a clear outlier not prepared as training data(corresponding to sensor failure, sharp change in operation temperature,and the like for example) can be detected in advance. Thus, the failurepreceding period can be more reliably determined. Thus, the problem thathow the supervised learning in the first learning behaves in a regionwith no training data cannot be understood for sure can be dealt withfor a certain level. The fluid control device 8 is often placed in anoperating environment completely different from the previous one, due tomodification of the host apparatus, and thus it can be used as indexdata indicating whether learning should be performed again.

If an abnormality can be predicted, the administrator terminal or thelike used by the administrator of the fluid control device 8 may benotified of such information, or the fluid control device 8 may benotified of the information and the warning display unit 54 may becaused to perform warning display.

In the example described above, the server 72 includes the determinationprocessing unit 721 and the correction processing unit 722.Alternatively, the present invention can be applied to a case where thefluid control device 8 includes the determination processing unit 721and the correction processing unit 722. In such a case, the informationcollection unit 724 collects the abnormality determination result fromthe fluid control device 8.

For example, the analysis by the correlation analysis unit 727 isexpected to yield the following analysis results.

(1) Correlation between the number of opening/closing times andoccurrence of abnormality in the same use period of the fluid controldevice 8

For example, it is expected that the abnormality occurrence probabilitydiffers between the case where the valve is opened/closed for 10 milliontimes in three years and the case where the valve is opened/closed for10 million times in three months.

(2) Correlation between environmental temperature and occurrence ofabnormality

For example, it is expected that the abnormality occurrence probabilitydiffers between use in an environment at 20° C. and use in anenvironment at 80° C.

(3) Correlation between thrust of piston 126 and occurrence ofabnormality

For example, it is expected that the load on the diaphragm 113 isaffected by a magnitude in the thrust of the piston 126 (depending on amagnitude in the driving pressure).

(4) Correlation between opening/closing speed of the fluid controldevice 8 and occurrence of abnormality

For example, it is expected that the abnormality occurrence probabilityvaries depending on the magnitude of the average moving speed of thepiston 126.

(5) Correlation between vibration and occurrence of abnormality

For example, it is expected that the abnormality occurrence probabilityvaries depending on the magnitude of the environment (vibration).

(6) Correlation between distortion of a component of the fluid controldevice 8 and occurrence of abnormality

For example, it is expected that the abnormality occurrence probabilityvaries depending on the magnitude of the internal stress of each member.

(7) Correlation between humidity and occurrence of abnormality

For example, the abnormality occurrence probability varies depending onthe humidity and among members, such as the O rings 1262, 1263, and 24in particular.

(8) Correlation between initial hardness/change in hardness andoccurrence of abnormality

For example, it is expected that the abnormality occurrence probabilityvaries depending on a magnitude of initial hardness of components of thefluid control device 8 at the beginning of use. Further, it is alsoexpected that the abnormality occurrence probability varies depending ona magnitude in the hardness change rate.

Depending on the learning result of the model, for a measurement valueof each sensor, a model may be obtained including processing that issimilar to predetermined frequency extraction/calculation of correlationbetween a plurality of pieces of sensor data/matching with apredetermined patter/integration/differentiation/others.

Furthermore, the abnormality determination result of the fluid controldevice 8 stored in the information storage unit 725 may includeinformation enabling a member (such as a damage on the diaphragm 113, adamage on the O ring 1262, 1263, and 24, or a member in the actuatorbody such as the piston 126) that has been damaged and results in theabnormality to be recognized. Thus, a member that is likely to beaffected by a change in the valve opening/closing speed, a change in aflowrate, and piston movement failure, and the like can be recognized.

In addition to predicting the occurrence of an abnormality by the abovedata mining, the prediction information may be compared with an actualoccurrence of the abnormality to analyze the correlation, to enhance theaccuracy of the correlation analysis.

REFERENCE SIGNS LIST

-   1 Fluid control device-   11 Valve body-   111 Flow path-   112 Seat-   113 Diaphragm-   LP Leak port-   S1 Space-   12 Actuator body-   121 Screw portion-   122 Exposed portion-   1221 Cover-   123 Screw portion-   124 Disk-   125 Pressing adapter-   126 Piston-   127 Spring-   13 Casing-   131 Cap body-   132 Actuator cap-   1321 Fixing member-   133 Cap top-   21 Introduction pipe-   22 One-touch fitting-   23 Fixing member-   24 O ring-   3 Holding member-   31 Protrusion-   3 a Through hole-   3 b Through hole-   41 Pressure sensor-   42 Temperature sensor-   43 Limit switch-   NW1, NW2 Network

1. A fluid control device comprising: an information processing moduleprovided in the device; a valve body having a flow path; an actuatorbody fixed to the valve body; a hollow casing that is fixed to theactuator body and has a side surface on which a through hole is formed;a piston that is provided in the actuator body and in which a drivingpressure introduction path that communicates with a driving pressureintroduction chamber is formed; and an introduction pipe through whichdriving pressure is introduced, the introduction pipe having one endinserted to the driving pressure introduction path and another endleading to an outside through the through hole of the casing.
 2. Thefluid control device according to claim 1, wherein an informationdisplay panel through hole to which an information display panel is fitis formed on an upper surface of the casing, the information displaypanel being connected to the information processing module.
 3. The fluidcontrol device according to claim 1 further comprising a sensor providedin the device, wherein on an outer circumference surface of the actuatorbody, a screw that is screwed with a screw formed on the valve body andan inner circumference surface of the casing is formed and a wiringgroove through which wiring drawn out from the sensor passes is formedin a portion with which the valve body and the casing are screwed, andthe wiring drawn out from the sensor is routed into the casing throughthe wiring groove.
 4. The fluid control device according to claim 3further comprising a holding member that is provided in the casing andholds the information processing module in a space formed on an upperside of the introduction pipe in the casing, the holding member beingprovided with a through hole through which the wiring drawn from thesensor passes.
 5. A fluid control apparatus comprising the fluid controldevice according to claim 1.